2D Optical beam steering using phase-tuning in Si-ITO-based optical phased arrays

Abstract

This study presents a comprehensive simulation-based investigation of a 1 × 16 channel optical phased array (OPA), highlighting the advantages of utilizing Si-ITO phase shifters over conventional Si-based devices. Through rigorous FDTD simulations, we achieved a compact OPA design with dimensions of 0.07mm × 0.02mm, demonstrating remarkable steering capabilities. The Si-ITO phase shifters enabled a wide lateral steering range of 56°, surpassing the performance of conventional phase shifters that would require significantly larger apertures to achieve similar results. Additionally, we achieved a 23° longitudinal steering range through wavelength tuning from 1.5μm to 1.6μm, with a divergence angle of 3.5°× 7.5°. The use of Si-ITO as a phase shifter, owing to its superior electro-optic effect, addresses the inherent limitations of traditional phase shifters, particularly their larger footprints. The chip-scale dimensions of ITO play a crucial role in achieving compact phase shifters, essential for high-density on-chip packaging. This advancement in Si-ITO technology holds significant promise for the development of compact, efficient, and high-performance OPAs for future on-chip optical communication systems. © 2026 World Scientific Publishing Company.