Study of electrode patterns for the development of piezoelectric stages

Abstract

Piezoelectric stages have some promising application in the field of laser beam scanning and steering, micro projection displays and various micro positioning systems. Generally, the actuation mechanism of such Piezo stages is consisting of Unimorph/Bimorph actuators. In this research work, a novel Monolithic Piezoelectric Stage (MPS) is conceptualized and simulated. The MPS, with the help of Interdigitated Electrode pattern (IDE), is able to perform actuation like Tilting along X and Y axis and Translation in Z direction without the use of any subsequent or passive layer. Tilting of 0.55o and Translation of 28 μm using a potential of 40 volts is simulated for the device having foot print of 20 mm2. Comparison of actuation using Parallel Plate Electrode (PPE) and IDE is also discussed and parametric study and optimisation of IDE geometry has been done to enhance the performance of the device. Abrasive Water Jet Machining (AWJM) has been tried to fabricate the device and the challenges faced during the fabrication procedure and reasons for the failure in fabrication of device is discussed in this work. Alternative method for fabrication using diamond saw cutting and grinding which results in decrement of piezoelectric coefficient of the material is also discussed in this research work.