Gate-All-Around Nanowire Junctionless Transistor-Based Hydrogen Gas Sensor

Abstract

This paper reports on the detection of hydrogen (H2) gas by utilizing a gate-All-Around nanowire (NW) junctionless (JL) transistor as a sensor. The effects of temperature and pressure are considered in the transduction process through a change in gate workfunction of palladium (Pd) gate after exposure to H-{2} gas. The analysis is performed through TCAD simulations, and an analytical model is developed in the subthreshold regime of device operation at a relatively low drain bias of 0.5 V. The performance of the NW JL transistor gas sensor is evaluated through the OFF-current-based sensitivity ( S-{I} ) and sensitivity based on threshold voltage shift ( S-{V} ). The analytical model developed for S-{I} and S-{V} shows a very good consistency with simulation data. The anomalous behavior of threshold voltage with temperature in the NW JL transistor under the influence of H-{2} gas is analyzed in detail. This paper predominantly focuses on utilizing the NW JL transistor for low-power gas sensing, specifically at low pressures (10-15-10-10 torr), for temperatures ranging from 250 to 450 K. Insights into physical mechanisms within the device due to the transduction process are highlighted for optimum sensing. © 2001-2012 IEEE.