Hardness and mechanical anisotropy of hexagonal SiC single crystal polytypes

Abstract

The mechanical response of single crystal silicon carbide (SiC) of two hexagonal polytypes (six layer, 6H- and four layer, 4H) was investigated using nanoindentation. Indentations were performed on two specific crystallographic orientations of single crystals i.e., normal to the basal, (0001) and prismatic, (101¯0) planes, in the load range between 25 mN and 500 mN. A significant anisotropy in the hardness is observed with the basal orientations showing a higher hardness compared to prismatic orientations. In both orientations, the 6H-SiC polytype exhibits higher hardness than the 4H-SiC polytype. It is also observed that the hardness decreases with increasing indentation load, suggesting that SiC crystals exhibit indentation size effect. However, unlike hardness, elastic modulus is independent of indentation load and the elastic anisotropy is insignificant. Severe cracking, particularly at higher indentation loads is noticed near the edges of the indentation imprints. The indentation fracture toughness, KIC i computed from the imprints shows slightly higher values for 6H-SiC compared to the 4H-SiC. However, for both the polytypes, a slightly higher KIC i is observed for basal indentations compared to the prismatic ones. © 2018 Elsevier B.V.