Design & development of laser decal transfer based μ- 3D printer for printing micro scale structures for MEMS applications

Abstract

The majority of the microelectromechanical (MEMS) devices are fabricated using either a lithography process or some microfabrication system which goes through the phase change process during the fabrication process. The phase change during processing leads to the change in the chemical as well as the functionality of the fabricated devices hence it is essential to develop a process which retains the chemical and functionality of the structure before and after the fabrication process. The research work focuses on the development of a laser decal transfer-based micro 3D printing process by using a thin film as feed material for the printing of MEMS devices. In laser decal transfer, the thin film material is deposited on the sacrificial layer coated transparent substrate and the laser beam irradiates from the top of the transparent donor substrate.