Please use this identifier to cite or link to this item: https://dspace.iiti.ac.in/handle/123456789/15044
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dc.contributor.authorGangwar, Kaushalen_US
dc.contributor.authorApalani, Palani Iyamperumalen_US
dc.date.accessioned2024-12-24T05:20:01Z-
dc.date.available2024-12-24T05:20:01Z-
dc.date.issued2024-
dc.identifier.citationGangwar, K., & Anand, P. I. (2024). Micromachining of NiTi SMA Composite Bimorph for Smart Actuators Using a CO2 Laser. Springer, Scopus. https://doi.org/10.1007/978-981-97-5963-7_2en_US
dc.identifier.issn2662-3161-
dc.identifier.otherEID(2-s2.0-85209988822)-
dc.identifier.urihttps://doi.org/10.1007/978-981-97-5963-7_2-
dc.identifier.urihttps://dspace.iiti.ac.in/handle/123456789/15044-
dc.description.abstractComposites developed by depositing NiTi thin films onto a flexible substrate like Kapton polyimide can be utilized in micro-electro-mechanical systems (MEMS) such as actuators. However, fabricating customized actuators using thin film bimorph is still a challenge. Laser energy has been employed for micromachining of bulk materials and thin metal and plastic sheets for static structures. Continuing on the similar lines, this work attempts to develop smart actuators using micromachining of flexible composite of NiTi/Kapton polyimide bimorph. NiTi shape memory alloy (SMA) bimorph was fabricated using e-beam evaporation technique followed by micromachining using a 10.60 μm CO2 laser. The thickness of the deposited layer was 513 nm. The micromachining was attempted at varying fluences and sample feed. The micromachined edge was created at a laser fluence of 5.1 J/cm2 at sample feed rate of 40 mm/min without any heat-affected zone. The film near the micromachined edge was smooth, however, carbonization of polyimide was observed. Delamination of the deposited NiTi film was not observed after the interaction of laser with the bimorph. However, the laser interaction with the film increases the surface roughness near the micromachined edge compared to that of middle of the actuator. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2024.en_US
dc.language.isoenen_US
dc.publisherSpringeren_US
dc.sourceSpringer Proceedings in Materialsen_US
dc.subjectCO2 laseren_US
dc.subjectLaser micromachiningen_US
dc.subjectNiTien_US
dc.subjectShape memory alloyen_US
dc.titleMicromachining of NiTi SMA Composite Bimorph for Smart Actuators Using a CO2 Laseren_US
dc.typeBook Chapteren_US
Appears in Collections:Department of Mechanical Engineering

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