Laser scribed aluminum-polytetrafluoroethylene-based triboelectric nanogenerator as a self-energized vibration sensor for machine tool condition monitoring

Abstract

The Triboelectric Nanogenerator (TENG) can be an ancillary device for scavenging mechanical energy ubiquitous in industries. However, enhancing the output of TENG is a key area of research in energy harvesting. Conventional methods such as lithography and sandpaper replication require molds for surface area improvement, while Laser Scribing (LS) has revolutionized the fabrication of TENGs by enabling the production of complex patterns over large areas in a short time without additional requirements. In this work, we report novel LS technology for the output enhancement of TENGs. The Nd3+: YAG pulse laser with optimized parameters was used to etch the Aluminum (Al) layer of an Al-Polytetrafluoroethylene (PTFE) TENG. The LS parameters (laser fluence and spot overlap) were optimized to create micro/nano structures on the Al layer of the TENG, which increased its output. Among various combinations of TENG, the most optimal one achieved significantly higher values for peak-to-peak open circuit voltage, short circuit current, and power density, measuring 480 V, 22.7 µA, and 708 µW/cm2, respectively. These values were ∼45%, ∼61%, and ∼56% higher than those measured in the pristine TENG. Moreover, the most optimal TENG demonstrated its capability by charging a 10 µF capacitor up to 10.2 V in just 200 s while exhibiting mechanical robustness and consistent performance over 25,000 cycles. This top-performing TENG was then utilized to harness vibrational energy from a compressor, effectively serving as an energy harvester and a vibration monitoring sensor during loading conditions. © The Author(s) 2025.