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https://dspace.iiti.ac.in/handle/123456789/16492
Title: | Investigations on manufacturing of NiTi shape memory alloy bimorph-based flexible mirrors and microactuators for opto-mechatronics applications |
Authors: | Gangwar, Kaushal |
Supervisors: | Palani, I.A. |
Keywords: | Mechanical Engineering |
Issue Date: | 14-May-2025 |
Publisher: | Department of Mechanical Engineering, IIT Indore |
Series/Report no.: | TH714; |
Abstract: | Shape memory alloy (SMA) thin films-based structures have drawn much attention for a wide variety of applications such as beam deflection, interferometry, optical coherence tomography, microvalves, temperature sensors, micro grippers, micro-pumps, and micro-robots. These phase-change materials allow the freedom to alter the characteristics as per the requirements by changing the composition and fabrication conditions which are of utmost importance for SMA based device fabrication. The current research is fabricating NiTi SMA thin film bimorph-based structures with different techniques and process parameters for opto-mechatronics applications. In this work NiTi thin film based SMA bimorph was fabricated and its functional behavior towards opto-mechatronics applications were studied. The thin film deposition was carried out in thermal evaporation and e-beam evaporation. Thermal evaporation produces good thickness films with higher substrate-to-film adhesion which is effective for microactuator applications. However, for flexible mirror applications e-beam evaporation can produce a very dense and uniform SMA film on the Kapton polyimide substrate. |
URI: | https://dspace.iiti.ac.in:8080/jspui/handle/123456789/16492 |
Type of Material: | Thesis_Ph.D |
Appears in Collections: | Department of Mechanical Engineering_ETD |
Files in This Item:
File | Description | Size | Format | |
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TH_714_Kaushal_Gangwar_2106103001.pdf | 6.06 MB | Adobe PDF | View/Open |
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