Modeling and estimation of edge direct tunneling current for nanoscale metal gate (Hf/AlNx) symmetric double gate MOSFET

Abstract

This paper present, the modeling and estimation of edge direct tunneling current of metal gate (Hf/AlNx) symmetric double gate MOSFET with an intrinsic silicon channel. To model this leakage current, we use the surface potential model obtained from 2D analytical potential model for double gate MOSFET. The surface potential model is used to evaluate the electric field across the insulator layer hence edge direct tunneling current. Further, we have modeled and estimated the edge direct tunneling leakage current for high-k dielectric. In this paper, from our analysis, it is found that dual metal gate (Hf/AlNx) material offer the optimum leakage currents and improve the performance of the device. This feature of the device can be utilized in low power and high performance circuits and systems. © 2010 Elsevier Ltd. All rights reserved.