Laser Induced Backside Texturing (LIBST): For Enhanced Performance of Triboelectric Nanogenerators for Micro-Energy Harvesting

Abstract

Laser Induced Backside Texturing (LIBST) is a novel surface processing method that deforms the thin film to form embossed textures. In this work, the influence of LIBST of Fluorinated Ethylene Propylene (FEP) on performance of Triboelectric Nanogenerator (TENG) has been investigated. The FEP sheet was adhered to a Polymethyl Methacrylate (PMMA) sheet, and a 405 nm wavelength diode laser transmitted through FEP from the top and ablates PMMA sheet to form embossed patterns. These embossed patterns formed due to evaporation of the PMMA sheet that exerts pressure on FEP from the backside, generating an embossed texture toward the front. The effect of laser power, standoff distance, and scanning speed was investigated. The influence of laser power, interaction time, and recoil pressure on the crater formation and temperature distribution has been modeled using finite element analysis. Moreover, LIBST increased hydrophobicity and crystallinity. The effect of mesh and zigzag patterns created by LIBST on TENG’s performance was evaluated. Mesh-patterned LIBST-TENG has shown the most enhancement in performance. The open-circuit voltage, short-circuit current, and power density have achieved 20, 38, and 48% enhancement, generating 710 V, 41 µA, and 1960.6 µW/cm2. The LIBST-TENG can be used to power an electronic device. © ASM International 2026.