Microgrinding process of glass substrates

Abstract

The demand for precision components having micro-scale features and nanometric surface finish is ever-increasing in optical instruments, semiconductor industries, and biomedical analysis. Materials such as glass, silicon, and other advanced ceramics are often preferred in such applications. However, shaping or machining the aforesaid materials is difficult due to their brittle nature and tendency to form cracks. Microgrinding is a process with high capability for the fabrication and finishing of 2.5D/3D micro-structures in hard and brittle materials. The process has gained attention, and major developments have taken place only in the last one or two decades. A micro-abrasive tool, which is either a pencil-tip or a thin disc type, comes in physical contact with the workpiece and effects material removal by engaging multiple abrasives with the work material. Appropriate tool design, process parameters (cutting speed, feed rate, and depth of cut), and lubrication conditions can generate surfaces with dimensional accuracy within ~1 µm and surface roughness <10-20 nm. This chapter presents the fundamental mechanism and processing parameters of microgrinding to encourage young researchers to explore this domain. © 2026 selection and editorial matter, Nguyen Van Toan and Tarlochan Singh

individual chapters, the contributors.